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Magnetron Sputtering

Magnetron sputtering system for R&D purpose. 

- Competitive warranty (2 years)

- Circular or Rectangular type

- 1 ~ 6" substrates

- Heater upto 1000K

- Small footprint loading system

3 to 7 guns

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Customers' publications​

  1. Hong et al, “3D multilevel spin transfer torque devices” Applied Physics Letters 112 (11), 112402 (2018)

  2. Lee et al., "Channel scaling and field-effect mobility extraction in amorphous InZnO thin film transistors" Solid State Electronics, 135, 94-99 (2017)

  3. Lee et al., "Cerium silicate-based thin film apatites: high conductivity and solid oxide fuel cell application" MRS Communications, 7, 2, 199-205 (2017)

  4. Reed et al., “Effect of O2 fraction in the sputter gas on the electrical properties of amorphous In-Zn-O and the thin film transistor performance” Journal of Electronic Materials, 45 (12), 6310-6316 (2016)

  5. Hong et al., “The physics of spin transfer torque switching in magnetic tunneling junctions in sub-10-nm size range” IEEE Trans. Magn 52, 1400504 (2016)

  6. Lee et al., “Synthesis of thin film oxy-apatites and solid state fuel cells” Journal of the Electrochemical Society 163, 7 (2016)

  7. Lee et al., “Scaling Behavior of Amorphous In-Zn-O Thin Film Transistors with High Mobility over 35 cm2/Vsec” ECS Transactions 72(5), 59-65 (2016)

  8. Lee et al., “Metallization selection and the performance of amorphous In-Zn-O thin film transistors” Applied Physics Letters, 104, 252103 (2014)

Call

T: 1-844-JSNANO-1

    (1-844-576-2661)  

F: 1-408-432-5020 

Contact

contact@jsnano.net

3003 N. 1st Street

San Jose CA 95134 USA 

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