- 304 Stainless steel chamber

- 3 ~ 4" substrate

- Sliding slot for sample loading

- Heater upto 900K

- High Vacuum pump (75 L/sec. or 300 L/sec.)

- 1-3" gun or 2-2" guns with RF and DC powers

- MFC (Ar, O2, N2)

- Price range from $40K

Excellent for R&D purposes. Customized to:

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1) Up to 2-cathodes DC/RF Sputtering

2) E-beam evaporator

3) Reactive ion etching (RIE)